PFA-Lined Valves for Semiconductor Wet Processing

Ultra-High Purity Flow Control for Wet Etching, Wafer Cleaning, and Chemical Delivery Systems

Semiconductor manufacturing demands the highest levels of chemical purity and contamination control. Wet processing—including etching, cleaning, and surface preparation—uses aggressive chemicals such as hydrofluoric acid (HF), sulfuric acid, and ammonium hydroxide at concentrations and temperatures that rapidly degrade conventional materials.

GFT9 manufactures PFA-lined valves and sight glasses from our Clean Room Series, featuring electropolished stainless steel bodies with virgin PFA linings. These components provide the chemical resistance and ultra-low extractables required for semiconductor wet bench applications, chemical delivery systems, and ultra-pure water distribution.

Our products support critical semiconductor processes from wafer fabrication to backend packaging, where contamination at parts-per-billion levels can cause device failures and yield loss.

View Clean Room Product Range

Why Semiconductor Manufacturing Requires PFA-Lined Components

Semiconductor wet processing presents extreme material compatibility challenges. Process chemicals include some of the most aggressive substances in industrial use, while purity requirements exceed those of virtually any other industry.

The Contamination Challenge:

Modern semiconductor devices feature structures measured in nanometers. At these scales, even trace contamination—metal ions, particles, or organic compounds—can cause device failures. Wet processing chemicals must be delivered to the wafer surface without picking up contamination from piping, valves, or other fluid handling components.

Conventional metallic components are unsuitable for most semiconductor wet process chemicals. Stainless steel dissolves rapidly in hydrofluoric acid. Even specialized alloys like Hastelloy have limited resistance to the chemical combinations used in semiconductor processing. Plastic materials offer better chemical resistance but may release particles or organic extractables that contaminate process streams.

Why PFA is the Solution:

PFA (Perfluoroalkoxy Alkane) has become the standard material for semiconductor wet process fluid handling because it offers:

• Complete resistance to hydrofluoric acid (HF) at all concentrations
• Resistance to sulfuric acid, phosphoric acid, nitric acid, and their mixtures
• Compatibility with RCA clean chemistries (SC1, SC2) including hydrogen peroxide and ammonium hydroxide
• Ultra-low extractables—high-purity grades achieve <1 ppb metal contamination
• Smooth, non-particle-shedding surface that maintains fluid purity
• Temperature resistance for heated chemical processes up to 200°C
• Weldable joints that eliminate potential leak points and contamination sources

GFT9 Clean Room Series products combine PFA's chemical purity with the mechanical strength of stainless steel housings, providing reliable performance in demanding semiconductor manufacturing environments.

Applications Across Pharmaceutical Production

Semiconductor fabs require ultra-high purity components throughout their wet processing operations. GFT9 products serve critical functions in chemical delivery, wet bench processing, and facility systems.

Wet Etching Systems

Wet etching uses aggressive chemicals to selectively remove material from wafer surfaces. Hydrofluoric acid (HF) etches silicon dioxide. Phosphoric acid etches silicon nitride at elevated temperatures. Piranha etch (sulfuric acid + hydrogen peroxide) removes organic contamination. PFA-lined valves control chemical flow to wet benches while maintaining the purity required for defect-free processing.

Wafer Cleaning (RCA Clean)

The RCA cleaning process—developed at RCA Laboratories and still widely used—employs SC1 (ammonium hydroxide + hydrogen peroxide) and SC2 (hydrochloric acid + hydrogen peroxide) solutions to remove organic and metallic contamination from wafer surfaces. PFA-lined components handle these oxidizing mixtures without degradation or contamination.

Chemical Delivery Systems

Bulk chemicals must be delivered from storage to point-of-use without contamination. Chemical delivery systems use PFA-lined valves to control flow from drums or bulk tanks through distribution manifolds to individual process tools. Sight glasses enable visual verification of chemical flow and level.

Ultra-Pure Water (UPW) Systems

Semiconductor-grade ultra-pure water systems achieve resistivity of 18.2 MΩ·cm with parts-per-trillion contamination levels. PFA-lined valves maintain water purity throughout distribution systems, from generation through final delivery to wet benches and rinse stations.

Chemical Recirculation and Temperature Control

Many wet processes require precise temperature control of chemical baths. Recirculation systems move chemicals through heaters or chillers and back to process tanks. PFA-lined valves and sight glasses in these loops must withstand continuous chemical exposure at elevated or reduced temperatures.

Clean Room Series for Semiconductor Applications

  • PFA Lined Control Valve NPS 1½ NPS 1½ - Valve with pneumatic multi-spring actuator for fast, cost-efficient operation. - High quality industrial valve by GFT9

    PFA-Lined Ball Valves – Spheron9

    Reliable shut-off and isolation for chemical delivery and wet bench systems. The Spheron9 ball valve features an electropolished stainless steel body with full PFA lining, providing the chemical resistance and low extractables required for semiconductor wet processing.

    • Sizes: DN15 to DN100
    • Pressure Rating: PN16 / ANSI 150
    • Temperature Range: -20°C to +150°C
    • Body: Stainless Steel 1.4408, electropolished finish available
    • Operation: Manual lever, pneumatic, or electric actuator
    • Suitable for: HF, H₂SO₄, H₃PO₄, HNO₃, H₂O₂, NH₄OH, and UPW systems

    View Ball Valve RangeView Control Valve Range 
  • PFA Lined Ball Check Valve NPS 8 NPS 8 - On vertical mounting up to 60°, the center-guided ball closes the valve automatically. - High quality industrial valve by GFT9

    PFA-Lined Sight Glasses – Videron9

    Visual monitoring of chemical flow and level without contamination risk. The Videron9 sight glass enables operators to verify chemical delivery, check tank levels, and observe process conditions in wet bench systems.

    • Sizes: DN25 to DN100
    • Pressure Rating: PN16
    • Window Material: Borosilicate glass
    • Body: Stainless Steel 1.4408
    • Applications: Flow verification, level indication, visual process monitoring

    View Sight Glass Range 
  • PFA Lined Sight Glass NPS_10 NPS_10 - Sight glass mounts vertically or horizontally for easy installation in any environment. - High quality industrial valve by GFT9

    PFA-Lined Sample Valves – Provaron9

    Sample extraction for chemical analysis and quality verification. The Provaron9 enables contamination-free sampling of process chemicals for laboratory analysis, supporting chemical bath monitoring and quality control programs.

    • Sizes: DN15 to DN80
    • Pressure Rating: PN16 / ANSI 150
    • Temperature Range: -20°C to +150°C
    • Body: Stainless Steel 1.4408
    • Applications: Chemical bath sampling, quality verification

    View Sampling Range 
  • PFA Lined Strainer NPS 6 (on request) NPS 6 (on request) - Main view - High quality industrial valve by GFT9

    Custom PFA Solutions & Development Partnerships

    Semiconductor equipment manufacturers and fab operators often require specialized components for specific applications. GFT9 offers custom PFA lining solutions and welcomes development partnerships for semiconductor fluid handling challenges.

    Our engineering team can support:
    • Custom configurations for integration with OEM equipment
    • Specialized port arrangements and connection types
    • Prototype development for new process applications
    • Application engineering for challenging chemical services

    Whether you're designing new semiconductor equipment or upgrading existing wet process systems, contact our engineering team to discuss your requirements.

    Custom Made Solutions 
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Technical Specifications for Hydrogen Applications

Technical Specifications

Size Range (DN) DN 15 – DN 100
Size Range (NPS) ½" – 4"
Pressure Rating (DIN) PN 16
Pressure Rating (ANSI) Class 150
Temperature Range -20°C to +180°C (-4°F to +356°F
Extended range on request
Body Material (Standard) -
Body Material (Clean Room) Stainless Steel 1.4408 (CF8M), 1.4571, electropolished finish available
Lining Material Virgin PFA (Perfluoroalkoxy), cleanroom processed
Lining Thickness 2.5 – 3.5 mm
Face-to-Face Standard EN 558-1
Flange Standard (DIN) EN 1092-1
Flange Standard (ANSI) ASME B16.5
Certifications PED 2014/68/EU, ISO 9001:2015, FDA/USP Class VI material compatibility
Custom Engineering Available:
Electropolished surfaces (≤0.8 µm Ra), material certificates 3.1, custom configurations. Development partnerships welcome.

Chemical Compatibility

Chemical Compatibility

Chemical Formula Concentration Max Temp Rating


Hydrochloric Acid

 HCl All concentrations 150°C

Sulfuric Acid

H₂SO₄ All concentrations 200°C

Sodium Hypochlorite

 NaOCl All concentrations 100°C

Acetic Acid

 CH₃COOH All concentrations 150°C

Dichloromethane

 DCM Pure 40°C

Ethanol

 C₂H₅OH All concentrations 80°C

PFA is FDA-compliant and suitable for USP Class VI applications. Contact us for specific process chemical compatibility verification. |

Excellent Full resistance, suitable for continuous use Good Suitable for most applications Limited Verify for specific conditions

Quality and Documentation for Semiconductor Applications

Semiconductor manufacturing requires rigorous quality control and comprehensive documentation. GFT9 provides the quality assurance and traceability that semiconductor fabs and equipment manufacturers demand.

Quality Assurance:

• 100% spark testing of PFA linings (15kV) to verify integrity
• Pressure testing per EN 12266-1
• Dimensional verification to specification
• Visual inspection of all components

Documentation Packages:

• Material certificates (EN 10204 Type 3.1) for all metallic components
• PFA material certificates with batch traceability
• Test reports and inspection records
• Declarations of conformity

Manufacturing:

All GFT9 products are manufactured in Germany under ISO 9001:2015 quality management. Our facility in Kempen combines precision machining with controlled PFA lining processes to deliver consistent quality across production runs.

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German Engineering for Critical Applications

  • Manufacturing Excellence:

    All GFT9 products are manufactured in Germany under strict quality control. Our facility in Kempen combines traditional valve manufacturing expertise with modern PFA lining technology, ensuring consistent quality across every component.

  • Documentation and Traceability:

    Hydrogen projects demand comprehensive documentation for safety compliance and operational records. GFT9 provides complete documentation packages including material certificates (EN 10204 3.1), test reports, declarations of conformity, and—for control valve projects—digital valve passports with QR code access to lifetime records.

  • Technical Support:

    Our engineering team understands the specific requirements of hydrogen applications. From initial specification review through commissioning support, we work alongside project teams to ensure our products meet exact application needs.

  • Flexible Delivery

    With standard products available from stock and custom solutions delivered within project timelines, GFT9 supports both urgent replacements and planned capital projects.
About GFT9

Discuss Your Semiconductor Project Requirements

Whether you're specifying components for new fab construction, upgrading existing wet process equipment, or developing specialized semiconductor manufacturing systems, our technical team is ready to support your project.

Contact Options:

Email: sales@gft9.shop
Phone:+49 2152 9154990

We support projects from initial specification through delivery, with technical consultation available for material selection, chemical compatibility verification, and application engineering.

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